光干涉法对微振动的测量

Measurementof Micro-vibration Using Optical Interferometry

本文充分分析了迈克尔逊干涉仪的原理,巧妙地结合了微小振动测量的方法,确立了迈克尔逊干涉仪测微小振动的方案,在参考光反射镜前加一个凸透镜,形成一个类似于猫眼的装置——准猫眼动镜,这样使动镜的反射光不会引起光束偏正度的变化,得到更好的条纹对比度。很好地实现了光干涉法对振动的测量,为测量微小振动提供了一个有效的技术支持。本文采用的检测技术为检测条纹移动变化技术,探测器发射一束光信号,利用其是否接收到反射信号来判断条纹的暗亮,以高低电平表示,实现了信号的转换。通过计算机对电信号进行仿真处理,得到信号图和频谱图,从而提高了系统的测量精度。

In this paper,the technology of Michelson's interferometer was analyzed. Computer according to the levelof the signal level to make the appropriate action to complete the change of the image signals into electrical signals,signalconversion achieved,thereby improving the measurement accuracy of the system. Innovation of this paper lies in the referencebeam through the front of a convex mirror,forming a device similar to cat - cat quasi-moving mirror,so that themoving mirror does not cause the reflected light beam prejudiced degree change,get better the fringe contrast. This fullanalysis of the Michelson interferometer principle,it cleverly combines tiny vibration measurement methods and establishedsmall vibration Michelson interferometer scheme,to achieve a good optical interferometry for vibration measurement,to measure small vibration provides an effective technical support.