基于Marx电路的全固态纳秒脉冲等离子体射流装置的研制

The Development of Solid-State Nanosecond Pulsed Plasma Jet Apparatus Based on Marx Structure

研制一套具有快边沿纳秒脉冲等离子体射流装置。该装置由基于Marx电路的并带有尾切开关的全固态纳秒脉冲发生器和具有针环电极结构的等离子体射流装置组成。其中,纳秒脉冲源主要由直流电源、控制电路和主电路组成,主电路为10级模块化设计的Marx电路,使用MOSFET作为主开关和尾切开关;控制电路产生同步触发脉冲信号,通过光纤进行隔离后同步驱动MOSFET工作。输出纳秒脉冲电压参数为:幅值0~8k V可调,脉宽100~1 000ns,重复频率1Hz^1k Hz,上升沿30ns左右,下降沿50ns以内。等离子体射流装置使用氩气作为工作气体,其结构为针-环电极结构。搭建等离子体射流实验平台,并能够产生稳定的等离子体,为进一步探索大气压等离子射流的应用奠定了基础。

A nanosecond-pulse power generator apparatus is developed, which consists of a nanosecond pulse generator with chopping switch based on Marx circuit and a needle-ring structure electrode. The pulse generator is composed of DC power, control circuit and main circuit. The main circuit has 10 stages. Two MOSFETs are used as the main switch and chopping switch respectively in each stage. The control circuit can generate trigger pulse signals to drive MOSFET work by fiber-optic isolation. The generator can produce repetitive pulses. Herein, the range of output voltage is 0～8kV,pulse width is 100～1 000ns, pulse repetition frequency is 1Hz～1kHz, rise time is less than 30ns and fall time is less than 50ns. In the plasma jets, needle-ring electrode structure is adopted, and the working gas is argon device. Plasma jets experiment platform is also developed, which can sustain stable atmospheric pressure plasma jets.