4Sato T, Koyano K, Nakao M, et al. Novel manipulator for micro object handling as interface between micro and hu- man world[C]//IEEE/RSJ International Conference on Intelli- gent Robots and Systems. Piscataway, USA: IEEE, 1993: 1674- 1681.
5Codourey A, Zesch W, Buchi R, et al. A robot system for automated handling in micro-world[C]//IEEE/RSJ Internation- al Conference on Intelligent Robots and Systems. Piscataway, USA: IEEE, 1995: 185-190.
6Nelson B J, Zhou Y, Vikramaditya B. Sensor-based mi- croassembly of hybrid MEMS devices[J]. 1EEE Control Sys- tems Magazine, 1998, 18(6): 35-45.
7Rabenorosoa K, Clevy C, Lutz P, et al. A micro-assembly station used for 3D reconfigurable hybrid MOEMS assem- bly[C]//IEEE International Symposium on Assembly and Man- ufacturing. Piscataway, USA: IEEE, 2009: 95-100.
8Das A N, Murthy R, Popa D O, et al. A multiscale assembly and packaging system for manufacturing of complex micro-nano de- vices[J]. IEEE Transactions on Automation Science and Engi- neering, 2012, 9(1): 160-170.
9Wu W R, Yu D H, Du K, et al. A precision robotic sys- tem for 3-D micro-assembly[C]//IEEE International Conference on Robotics and Biomimetics. Piscataway, USA: IEEE, 2012: 1518-1522.
10Xu D, Li F D, Zhang Z T, et al. Characteristic of monocular microscope vision and its application on assembly of micro- pipe and micro-sphere[C]//The 32nd Chinese Control Confer- ence. Piscataway, USA: IEEE, 2013: 5758-5763.