微纳尺度电气击穿特性和放电规律研究综述

Review on the Breakdown Characteristics and Discharge Behaviors at the Micro & Nano Scale

微纳尺度电气击穿特性和放电规律是当前国内外学者的研究热点。本文回顾了近70年来国内外学者在该领域的主要研究工作和成果,重点从研究手段、放电规律以及物理机制等方面对不同物理尺度介电系统(宏观尺度电极/微米间隙、微米尺度电极/微米亚微米间隙、纳米尺度电极/纳米亚纳米间隙)的放电击穿特性进行了总结,阐述了电极间隙、气压、电极材料和电极形状等因素的影响机制以及不同物理尺度介电系统的放电规律。通过对微纳尺度电气击穿特性和放电规律的概括和分析,发现当前存在的主要问题并指出下一步的研究方向,对丰富和完善微纳尺度放电击穿理论具有重要参考意义。

The research on breakdown characteristics and discharge behaviors is gaining attentionnowadays.In this paper,the research progress and achievement on this field for nearly70years havebeen reviewed,emphasizing on the experimental technologies,discharge behaviors and physicalmechanisms of dielectric systems at various dimensions(the macroscale electrodes with microscalegaps,the microscale electrodes with micro-and sub-microscale gaps and the nanoscale electrodes withnano-and sub-nanoscale gaps).The influences of gap separations,gas pressure,electrode material,electrode shape on breakdown characteristics were summarized.Besides,the discharge behaviors ofvarious dielectric systems were discussed.As a consequence,the review of breakdown characteristicsand discharge behaviors at the micro&nano scale is beneficial to recognizing the critical problems andmaking suggestions for the future research,which could be of great importance to the electricalbreakdown theory at the micro&nano scale.