大气压介质阻挡放电双频调制技术数值模拟研究

Numerical Studies on the Modulated Strategy of Atmospheric Pressure Dielectric Barrier Discharge Plasmas Driven by Dual-Frequency

双频增强与调制技术为大气压介质阻挡放电提供了更多控制与优化关键等离子体参数的手段,特别是为其电子密度、气体温度独立调控提供了可能,是一种正处于探索发展中的创新技术。本文利用一维自洽流体模型并耦合半动力学方法,研究了双频增强与调制下的等离子体放电特性以及不同匹配方式对等离子体重要参数的影响规律,从耦合增益角度归纳了施加双频功率源频率选择的基本原则,通过考察电子、离子密度、电场以及电子碰撞激发的空间演化,分析了大气压介质阻挡放电双频调控机制,为充分了解并揭示双频调制机理,发挥这一新型等离子体源的优势奠定了理论基础。

As a developing innovative technology,the modulation strategy with dual-frequencycan effectively enhance plasma properties of atmospheric pressure dielectric barrier discharges(DBDs)and provide a possible approach to control and optimize the key plasma parameters,even realize theseparate control of the electron density and gas temperature.In this paper,a self-consistent fluid modelcoupling the semi-kinetics method is used to study the plasma discharge characteristics and the impactsof different matching modes on the key plasma parameters.Thus,the basic strategy for the modulationmethod is acquired based on the nonlinear coupling gain between two frequencies.Besides,the separatetuning mechanism is analyzed by means of the spatial evolutions of electron density,ion density,electric field and impact ionization of electrons.The work is important for deep understanding of thedual-frequency modulated DBD plasmas as well as the promotion of the associated applications.