摘要
The micro-beam is a beam of micrometer or sub-micrometer dimension, which allows precise defined quantitiesof ions to be introduced at precisely defined location. It has been a powerful tool for single event effects (SEE)study. At the IMP micro-beam facility, we have preliminarily built a SEE mapping system to study the microscopicsensitive areas of SEEs on integrated chips.In order to map the SEE distribution with the ion irradiation, the SEE event signal (E) from the device undertest is detected by the analog input of the SEE mapping system; through the SEE mapping software control, thebeam is scanned with the magnetic scan coil of the microbeam facility and the beam position of the scan coil ofthe microbeam facility is used to register the SEE position (X, Y ); Finally, the SEE distribution is drew with apseudo-color bit image online using (NE, X, Y ), where NE is the number of occurrence of SEE type E at beamposition (X, Y ). The input of the SEE mapping system can support simultaneously detection of up to three SEEsignals.
