新型复合真空计校准技术研究

RESEARCH ON CALIBRATION TECHNOLOGY OF NEW COMPOUND VACUUM GAUGE

随着真空应用产业的发展,新型复合真空计由于其具有优越的技术性能,在真空测量领域发挥着越来越重要的作用,被各大厂矿、企事业单位广泛使用。该真空计采用模块化集成设计,实验室常规的校准方法无法进行校准,通过对反磁控皮拉尼复合真空计测量原理的分析,将可变量输出的对数模拟标准电压信号转化为真空度信号,进行示值误差分析,对照国家颁布的相关校准规范,给出校准结果。此技术为复合真空计的校准提供了实验基础和理论依据,解决了该类型真空计的校准难题。

With the development of vacuum application industry,because of its superior technical skills,the new composite vacuum gauge is playing a more and more important role in the field of vacuum measurement.Due to its modular design,laboratory calibration methods have been unable to carry out routine calibration.Based on the analysis of the principle of magnetron cold Pirani vacuum gauge to measure the composite,log variable output analog signal is changed into standard voltage signal of the vacuum degree,error analysis is carried out,and calibration results is obtained.This technology provides the experimental basis and theoretical basis for the calibration of the vacuum gauge,and solves the problem of daily calibration of this vacuum gauge.