Al_2O_3膜层制备参数对SiO_2/Al_2O_3/PET复合膜透湿性能的影响

Effect of Al_2O_3 Film Preparation Parameters on the Moisture Permeability of SiO_2/Al_2O_3/PET Composite Films

采用磁控溅射工艺在PET衬底上依次沉积了Al_2O_3和SiO_2薄膜,制备出SiO_2/Al_2O_3/PET复合膜。利用扫描电镜和透湿仪对复合膜的表面形貌和透湿性能进行表征。研究了制备Al_2O_3膜层的射频功率、氩气流量、本底真空度和溅射时间4个参数对复合膜透湿率的影响。结果表明:复合膜的透湿率随着本底真空度的升高而减小,随着射频功率、氩气流量和溅射时间的增加均呈现先减小后增大的变化趋势;4个制备参数对复合膜透湿率的影响程度由大到小依次是本底真空度、氩气流量、射频功率、溅射时间;4个制备参数的较优组合为本地真空度0.5×10^(-3)Pa,射频功率300 W,溅射时间6 min,氩气流量70 m L·min^(-1)。

Al203film and Si02film were deposited on PET substrates by magnetron sputtering,and Si02/A1203/PET composite films were prepared.The surface morphology and the water vapor transmission(WVT)rates of the composite films were characterized by scanning electron microscopy(SEM)and moisture permeability instrument respectively.The influences of A1203film preparation parameters,including radio-frequency(RF)power,argon flow,vacuum degree and sputtering time on the WVT rates of Si02/Al203/PET composite films were investigated.The results show that the WVT rates decrease with the increase in vacuum degree,and firstly decreases and then increases with the increase in RF power,argon flow and sputtering time.Among the four process parameters,vacuum degree had the greatest effect on WVT rates,followed by argon flow,RF power and sputtering time.The optimal process parameters were obtained as the vacuum degree of0.5X103Pa,RF power of300W,sputtering time of6min and argon flow of70mL?min-1.