掩模图形切割方式对曝光时间的影响研究

Influence of Mask Pattern Cutting Mode on Exposure Time

掩模生产过程中,数据处理为至关重要的一环,利用专用数据处理软件,将客户设计的图形数据进行图形分割后转换成满足不同曝光机台的数据格式。通过调整数据处理软件的相关参数来研究对激光束曝光机、电子束曝光机曝光数据图形切割方式(fracture)的影响。通过实验数据确认图形切割方式的改变对两种曝光机台曝光时间的影响,最后通过合理优化参数值,在保证图形稳定性的同时,缩短曝光机台曝光时间,达到提升生产效率的目的。

In the process of mask production,the data processing as a vital part,using the special data processing software to segment the graphic data of customer design into the data format of different exposure machines.In this paper,by adjusting the parameters of the data processing software to study the influence of the laser beamexposure machine,electron beamexposure machine exposure data pattern cutting mode(fracture).The influence of the change of graphic cutting mode on the exposure time of two kinds of exposure machines is confirmed by experimental data.Finally,through the reasonable optimization of the parameter value,in order to ensure the stability of the graphics,shorten the exposure time of the exposure machine,and ultimately achieve the purpose of improving production efficiency.