摘要
本文对等离子喷涂氧化物阴极的涂层表面电子发射均匀性、逸出功、激活前后成分进行了分析,并探讨了阴极表面成分变化的原因。实验结果显示,等离子喷涂氧化物阴极电子发射密度大而且均匀,逸出功分布在1.52~1.58eV之间占到80%,跟激活前的阴极相比,激活后的阴极表面成分除了作为参考的Ca,其他元素都有不同程度的降低,包括表面活性物质Ba。本文最后探讨了阴极表面Ba元素减少的原因。
Electron emission uniformity and work function distribution on the surface of plasma-sprayed oxide cathodes are analyzed,element contents on cathode surface before and after activation are compared,and the reasons for element change are discussed.The research result shows that the plasma-sprayed oxide cathodes have high electron emission density and high emission uniformity,the area where the work function ranging from 1.52 to 1.58 eV is about 80% of the total surface,all element contents including surfactant Ba decline except Ca.Finally the reason for Ba reduction is investigated.
作者
张敏
王小霞
ZHANG Min;WANG Xiao-xia(Beijing Vacuum Electronics Research Institute, Beijing 100015,China;Institute of Electronics, Chinese Academy of Sciencss, Beijing 100080,China)
出处
《真空电子技术》
2017年第3期58-60,共3页
Vacuum Electronics
关键词
氧化物阴极
等离子喷涂
电子发射
逸出功
Oxide cathode
Plasma-sprayed
Electron emission
Work function