微加工和太赫兹真空电子器件技术进展

Advance of Micro-fabrication and THz Vacuum Electronic Devices

本文对微加工和太赫兹真空电子器件技术进展进行了评论,讨论了微加工和太赫兹真空电子器件可能的应用,也研究了微型器件、微加工的关键技术和需要进一步研究的理论和技术问题。

The advance of micro-fabrication and THz vacuum electronic devices are reviewed in this paper.The application of the micro-fabrication techniques and terahertz vacuum electronic devices are discussed.The key techniques in terahertz vacuum electronic device development,its micro-fabrication and some theoretical problems are also mentioned.