基于扫描激光差动技术的圆度误差检测

Detection of roundness error based on scanning laser differential technique

为了提高回转体圆度误差测量精度,基于差动技术,并利用小波变换过滤算法及圆度误差最小二乘法模型,提出一种基于扫描激光差动技术的圆度误差检测系统。采用分光镜分束的方法,形成两束光强调制信号,从原理上消除偏心误差的影响。通过对一标定零件进行圆度误差测量实验,设定不同的实验条件,偏心量分别为2~4 mm,5~7 mm、8~9 mm,所测得圆度误差值相差不超过0.62μm。表明测量系统可以有效消除偏心误差,完成对回转体零件圆度误差的检测。解决了目前圆度误差检测中回转轴偏心量误差消除难度大、测量效率低等问题,为高精度检测提供了一种新思路。

In order to improve the measuring accuracy of roundness error of rotational parts,according to wavelet transform filtering algorithm and the least squares model,a roundness error detection system based on scanning laser differential technology were proposed.Two light beams with intensity modulation signals were formed by a spectroscope,and the influence of eccentricity error is eliminated in principle.The measurement of the roundness error was carried out for a calibrated part,and different experimental conditions were set.When the eccentricities are2~4mm,5~6mm and7~8mm respectively,the difference of the roundness errors is less than0.62μm.The results show that the measurement system can effectively eliminate the eccentricity error and complete the roundness error detection of the rotational parts,which provides a new method for the high-precision measurement.