基于菲涅尔衍射的圆孔直径测量

Measurement of circular aperture diameter based on Fresnel diffraction

本文提出一种新的圆孔直径测量的方法。平行光照射下,圆孔直径和菲涅尔衍射光强分布中峰值轮廓直径存在一定的关系,根据该关系可以实现圆孔直径的测量。仿真和实验数据证明,该方法对于直径5~10 mm的圆孔可以达到亚微米级的测量精度。

A new diameter measurering method of circular aperture based on Fresnel diffraction is proposed.Under the irradiation of parallel light,there is a special relationship between the diameter of peak contour in Fresnel diffraction light intensity distribution and the diameter of circular aperture to be measured,and then the diameter of the circular aperture can be measured according to the relationship.Simulations and experiments show that the accuracy of this method can reach up to submicro order for the measurement of the circular apertures with diameter of5~10mm.