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一种表面结构多尺度融合测量系统 被引量:3

A Kind of Multi-scale Integration Measurement System for Surface Textures
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摘要 提出了一种表面结构多尺度融合测量系统,该系统将显微图像测量、垂直扫描白光干涉测量、白光干涉纳米探针测量和白光干涉金刚石探针测量等多种不同尺度的表面结构测量方法融合在一起。实验结果表明,显微图像测量对300μm标准玻璃线纹尺的示值误差为-0.251μm,标准偏差为0.4013μm;白光干涉测量对1.26μm和3.33μm单刻线样板的测量平均值分别为1.263μm和3.328μm,示值误差分别为0.003μm和-0.002μm,示值相对变化量为1.27%和0.63%;白光干涉纳米探针对高度为(106.8±1.0)nm的校准光栅测量平均值为103.1nm,相对示值误差为-3.5%;白光干涉金刚石探针测量对Ra=4.08μm样板的测量值为4.05μm,测得值的相对误差为0.74%。所提出的测量系统满足表面结构的多尺度融合测量要求。 A multi-scale integration measurement system was presented.Different scale measurement methods were integrated,such as microscopic image measurement,vertical scanning white light interferometry measurement,nano-probe measurement by white light interferometry and diamond probe measurement by white light interferometry.The measurement results show that in microscopy image measurement for standard glass thread ruler of 300μm,the indication error is as-0.251μm and the standard deviation is as 0.403μm.In white light interferometry for single engraved templates of 1.26μm and 3.33μm,the mean measurements are as 1.263μm and 3.328μm,indication errors are as 0.003μm and-0.002μm,the relative change of indication are as 1.27%and 0.63%respectively.In nano-probe measurement by white light interferometry for calibration grating of(106.8±1.0)nm,the mean is as 103.1 nm and the relative error is as-3.5%;in diamond probe measurement by white light interferometry for standard template of Ra=4.08μm,the measurement Ra is as 4.05μm and the relative error is as 0.74%.The introduced system may satisfy the measurement needs and realize the multi-scale integration measurement for surface textures.
作者 王生怀 徐风华 陈育荣 谢铁邦 WANG Shenghuai;XU Fenghu;CHEN Yurong;XIE Tiebang(School of Mechanical Engineering,Hubei University of Automotive Technology,Shiyan, Hubei,442002;School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan,430074)
出处 《中国机械工程》 EI CAS CSCD 北大核心 2018年第6期705-711,719,共8页 China Mechanical Engineering
基金 国家自然科学基金资助项目(51275159 51475150) 国家留学基金资助项目(201308420014) 中国博士后科学基金资助项目(2011M501199) 湖北省自然科学基金资助项目(2013CFB045)
关键词 表面结构 多尺度 融合测量 纳米探针 surface texture multi-scale integration measurement nano-probe
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