镁钇合掺氧化锌薄膜的制备及其性能研究

Preparation and Properties of Magnesium and Yttrium Doped Zinc Oxide Thin Films

以镁钇掺杂的氧化锌(Zn O)陶瓷靶作为溅射靶材,采用射频磁控溅射技术在玻璃衬底上制备了镁钇合掺Zn O(MYZO)薄膜样品.通过X射线衍射仪和分光光度计的测试表征,研究了薄膜厚度对MYZO样品结构性质和光学性能的影响.结果表明:MYZO样品均为六角纤锌矿型的多晶结构,并且其择优取向生长特性明显受到薄膜厚度的影响,当薄膜厚度为290 nm时,MYZO样品具有(002)择优取向生长特性.另外通过光学表征方法获得了MYZO样品的光学能隙、折射率和消光系数,结果显示:MYZO样品的光学能隙大于未掺杂Zn O能隙,其折射率均表现为正常色散特性,并且遵循Wemple-Di Domenico单振子色散模型.

The magnesium and yttrium doped zinc oxide(MYZO)thin films were deposited on glass substrates by radio,frequency magnetron sputtering technique,using the ceramic target fabricated by sintering the mixture of MgO,Y2 O3 and ZnO nanometer powder.The influence of thickness on structure and optical properties of the deposited films was investigated by X?ray diffractometer and spectrophotometer.The results show that all the MYZO films are polycrystalline with a hexagonal structure,and that the thickness significantly affects the preferred growth orientation of the deposited films.When the thickness is 290 nm,the MYZO films have strong(002)peak and show obvious preferred growth orientation of(002).In addition,the direct optical bandgap,refractive index and extinction coefficient of the films were determined by optical characterization methods.It is observed that the direct optical bandgaps of the MYZO films are greater than that of the undoped ZnO.All the deposited films exhibit the normal dispersion relation in the visible region,and the refractive index dispersion curves of the films obey the single?oscillator Wemple,DiDomenico model.