利用双温模型理论分析飞秒激光烧蚀金过程

Numerical Simulation of Femtosecond Laser Ablation Au by Two-Temperature Model

为了了解飞秒激光脉冲烧蚀金过程中的电子温度和晶格温度变化。利用显式有限差分法对飞秒激光脉冲烧蚀金的过程中电子和晶格的温度场进行一维数值计算。理论研究了不同激光脉宽和电声耦合系数对金属表层电子和晶格温度的影响,同时还研究了双脉冲激光烧蚀金过程中电子和晶格温度的变化。得出激光脉冲越短,加工热效应越小,多脉冲具有热累积效应。因此,为了实现飞秒激光冷加工,应该采用单个超短脉冲降低热效应。

In order to understand the electron temperature and lattice temperature distribution during the femtosecond laser ablation metal Au process.A one-dimensional numerical calculation for the temperature field of electron and lattice was performed during femtosecond pulse laser ablation metal Au by explicit finite difference method.The effects of the electron and lattice temperature distribution with the evolution of time were researched theoretically with different laser pulse widths and electron-phonon coupling constants.The temperature varieties of electron and lattice were also obtained during the two femtosecond laser pulses irradiated the metal Au.The thermal effect was lower when the pulse width was much shorter.and the multi-pulse fabrication has thermal accumulation effect.Therefore,in order to realize the cool fabrication,single short pulse laser should be used in laser fabrication.