高振实密度低氧铌化物粉体的制备及表征

Preparation and Characterization of High Tap Density Niobium Oxide Powders

氧化铌靶材广泛应用于变色玻璃及低辐射玻璃镀膜,用于制备靶材的氧化铌要求有较高的振实密度。为提高氧化铌产品的振实密度,采用聚乙烯醇(PVA)黏结剂混合氧化铌粉体、压块,真空烧结炉于1 200℃高温烧结3 h,然后进行粉碎过筛,制备出黑色的铌氧化物粉体;并用XRD、TEM等手段对粉体物相、成分,颗粒大小及微观形貌进行了研究,同时对粉体粒度分布、振实密度及氧含量进行了测试。结果显示粉体D50=6.64μm,振实密度2.28 g/cm^3,失氧量为粉末中总氧含量(质量)的13.6%,铌氧化物分子式接近Nb O_2,达到喷涂靶材用原料质量要求。

Niobium oxide target is widely used in discoloration glass and low-emissivity glass coating.The niobium oxide,which is used to prepare the target material,requires a higher tap density.In order to improve the tap density of niobium oxide products.PVA binder was used to mix niobium oxide powder,briquettes and vacuum sintering furnaces at high temperature,and then pulverized and sieved.The phase,composition,particle size and microstructure of the powders were studied by means of XRD,TEM and other means.At the same time,the particle size distribution,tap density and oxygen content of the powders were tested.The results show that the powder D 50=6.64μm,the tap density of 2.28 g/cm 3,the amount of oxygen loss,the amount of oxygen and the oxygen content of the powder were measured.For the powder in the total oxygen content(mass)of 13.6%,niobium oxide molecular formula close to NbO 2,to spray the target material with the quality requirements.