压电微喷驱动振子振动的理论分析

Theoretical Analysis of Oscillator Vibration of Piezoelectric Micro-spray

压电驱动振子是由压电材料层和单晶硅层复合而成.以压电微喷驱动振子为研究对象,根据压电本构方程和弹性薄板弯曲理论,应用能量法对其进行了理论分析,建立了周边固支条件下压电驱动振子振动的理论模型,推导求解了驱动振子一阶固有频率及位移函数,MATLAB编程计算结果与ANSYS软件仿真结果误差为6.6%,表明了二者的一致性.分析了激励电压及压电驱动振子结构参数对轴向振动位移的影响,研究结果可为压电微喷液滴发生器的设计及控制提供理论依据.

The piezoelectric actuator is composed of a piezoelectric material layer and a single crystal silicon layer.Based on the piezoelectric constitutive equation and the bending theory of the elastic thin plate,the theoretical model of the vibration of the piezoelectric driven vibrator under the surrounding fixed condition is established by using the energy method.The first-order natural frequency and displacement function of the driving oscillator are solved.The error of MATLAB programming result and ANSYS simulation result is 6.6%,which indicates the consistency of the two and analyzes the relationship between the excitation voltage and the piezoelectric oscillator.The research can provide the theoretical basis for the design and control of the piezoelectric micro-jet droplet generator.