摘要
随着光学精密加工技术的发展,非球面光学元件在各种光学系统中广泛应用,高精度非球面检测技术对非球面光学元件的发展意义重大。论述了基于干涉法的非球面面形误差检测技术。根据检测原理,分别对零位干涉检验法与非零位干涉检验法进行了详细介绍。概述了近年来主流的非球面检测技术现状,展望了非球面面形检测技术的发展趋势。
With the development of optical precision manufacturing technology,aspheric optical components are widely used in various optical systems.Therefore,high-precision aspheric surface measurement technology is of great significance to aspheric optics manufacture.This paper introduces the aspheric surface testing technique based on interference method.According to the principle of measurement,the null testing and the non-null testing are introduced in detail.Then,it summarizes the current situation and the development trend of aspheric testing technology.
作者
郝群
宁妍
胡摇
HAO Qun;NING Yan;HU Yao(Beijing Key Lab.for Precision Optoelectronic Measurement Instrument and Technology,School of Optoelectronics,Beijing Institute of Technology,Beijing 100081,China)
出处
《计测技术》
2018年第1期1-8,共8页
Metrology & Measurement Technology
基金
国家自然科学基金(51327005,51735002,61705008)
