基于集成氮化硅微腔的光学传感芯片研究

Research of Optical Sensor Chip Based on Integrated Silicon Nitride Microcavity

近年来随着传感器在生物探测领域的应用,提高传感器芯片的灵敏度成为研究的热点。利用氮化硅微腔灵敏度高、成本低、易于集成的优点,设计制造了1550 nm波长下二维、三维结构品质因子分别为1.6×104和4×103的悬空耦合传感器芯片,并详细研究了集成氮化硅微腔光学传感芯片在折射率测量方面的应用。

Sensors have been used in biological detection.The high sensitivity of the sensor chip has become a new research hotspot.Two-dimensional and three-dimensional coupling silicon nitride microcavity sensors are experimentally demonstrated based on the high sensitivity,low cost,and easy integration of the silicon nitride microcavity.The application of the integrated silicon nitride microcavity optical sensor chips in refractive index measurement is studied in detail.A quality factor of more than 1.6×10 4 at a wavelength of 1550 nm can be obtained in two-dimensional structure and a quality factor of 4×10 3 at a wavelength of 1550 nm can be obtained in three-dimensional structure.It is demonstrated that suspension structure can greatly improve the performance of the device.