基于硅双固态梁PyroMEMS安保机构的设计、制备及作动性能

Design,Fabrication and Actuation Performance of PyroMEMS Safe and Arm Device Based on Silicon Double Solid Beams

为适应武器弹药安全系统微小型化、高可靠性的发展要求,设计了一种基于硅双固态梁的烟火微机电系统(PyroMEMS)安全保险机构。采用ABAQUS软件对安保机构层中固态梁的耐压强度与耐过载强度进行了模拟仿真。根据模拟仿真结果采用微机电系统(MEMS)工艺制备了PyroMEMS安保机构原理样机。为研究作动性能,选用质量配比为1∶9的硅铅丹(Si/Pb_3O_4)作为点火药,选用质量配比为1∶1的苦味酸钾/高氯酸钾(C_6H_2(NO_2)_3OK/KClO_4)作为产气药。结果表明,安保机构层中固态梁在长与宽均为300μm时耐压强度为310.03 MPa,耐过载强度为47.31 g。设计的PyroMEMS安保机构可成功实现安保功能。

To meet the development requirements of miniaturization and high reliability of weapon and ammunition safety system,a safe and arming device of pyrotechnical micro-electro-mechanical system( PyroMEMS) based on silicon double solid beams was designed. The compressive strength and overload strength of the solid beam in the safe and arming mechanism layer were simulated by using ABAQUS software. The principle prototype of safe and arming device of PyroMEMS was fabricated using micro-electro-mechanical system( MEMS)technology according to the simulation results. In order to study its actuation performance,the Si/Pb_3O_4 mixture of mass ratio as 1 ∶ 9 was selected as ignition powder and the C_6H_2( NO_2)_3OK/KClO_4 mixture of mass ratio as 1 ∶ 1 was selected as gas generator. Results show that the compressive strength is 310.03 MPa and the overload strength is 47.31 gas the boh length size and width size of silicon double solid beams in the safe and arming device are 300 μm.The designed PyroMEMS S & A device can successfully realize safe and arming functions.