基于PET基片的柔性石墨烯应变计加工方法

Fabrication of flexible graphene strain sensor based on PET substrate

针对PET塑料耐温性能较差,与标准微纳加工工艺不兼容等问题,开发了面向PET塑料基底材料的光刻、镀膜等微纳加工工艺。通过CVD生长、转移等方式将单层石墨烯薄膜附着于0.5mm厚PET基底,并采用微纳加工的方式制备了柔性石墨烯压阻应变计。工艺结果表明,本研究所提出的加工方法适用于以PET塑料作为衬底材料的柔性微纳器件的制作。通过对PET塑料衬底施加应变并测量石墨烯的电阻变化率,可计算出石墨烯的压阻应变系数约为1.3。

In view of the incompatibility of PET material with the standard microfabrication due to its low intolerance to high temperature,an effective fabrication process including lithography,metal deposition and reactive ionetching have been developed which paves the way for direct micro processing on PET.Based on such a method,thin film graphene layer was grown and transferred to 0.5mm thick PET substrate and the graphene strain sensor was successfully fabricated.According to the measurement results,the piezoresistive gauge factor of the graphene can be estimated about 1.3,which is in good accordance with thevalue given in literature.Such fabrication method can also be applied in the domain where flexible micro devices are required.