硅切割废砂浆沉积抑制方法的研究

Study on inhibitation of drained slurry agglomerate after wire-sawing

硅片切割废砂浆很容易发生团聚,对在线回收砂浆质量以及硅片切割效果和硅片清洗均有不良的影响。通过探讨废砂浆中大颗粒的形成过程及条件,揭示砂浆团聚的主要原因;同时发现,调控废砂浆不同初始pH,其pH最终都会趋于一个定值,即为废砂浆pH平衡点。通过调节废砂浆pH使其小于平衡点,可以有效抑制砂浆聚集结块。

The slurry is easy clumped and agglomerated after wire-sawing,which has bad effect on the quality of the recycled slurry and the cleaning of silicon wafer.The cause of the drained slurry agglomerate was revealed by discussing the forming process and conditions of the large particles.After regulation,the initial pH of slurry can tend to a certain value,which is the equilibrium point.By adjusting the pH to less than the equilibrium point,slurry agglomeration could be effectively inhibited.