摘要
利用N_2携带先驱体钛酸异丙酯,通过双频驱动的Ar/O_2大气压冷等离子体制备了TiO_2薄膜,探究了不同放电参数对TiO_2表面形貌的影响.研究结果表明,不同的放电参数可以制备出纳米纤维状、球状和塌陷的球状不同形貌的TiO_2.制备的TiO_2包含锐钛矿相和金红石相.同时利用光谱仪和射频分析仪对离子体的光学特性和电学特性进行了检测.
Titanium oxide(TiO2)films are prepared in Ar/O2 atmospheric pressure cold plasma jet driven by dual-frequency in this paper.The titanium tetraisopropoxide(TTIP)carried by N2 is used as the precursor.The effect of discharge parameters on morphology of TiO2 is studied.The result of scanning electron microscopy(SEM)indicates that the TiO2 posses different surface morphology like nano fibrous,sphere and collapse sphere in different discharge parameters.The results of Raman shift spectroscopy demonstrate that TiO2 crystals consist of anatase and rutile.Optical properties and electrical properties of plasma are detected by spectrograph and octiv suite sensor unit.
作者
袁强华
李洋
张亚东
鉴霄阳
YUAN Qiang-hua;LI Yang;ZHANG Ya-dong;JIAN Xiao-yang(College of Physics and Electronic Engineering,Northwest Normal University,Lanzhou 730070,Gansu,China)
出处
《西北师范大学学报（自然科学版）》
CAS
北大核心
2018年第2期43-48,共6页
Journal of Northwest Normal University(Natural Science)
基金
国家自然科学基金资助项目(11665021)
