溶胶-凝胶法制备PbZr_(0.52)Ti_(0.48)O_3铁电薄膜及其光伏特性的研究

Photovoltaic Property of PbZr_(0.52)Ti_(0.48)O_3 Ferroelectric Film Fabricated by Sol-Gel Method

使用溶胶-凝胶法在石英玻璃基片上制备了PZT铁电薄膜,通过控制热处理工艺,制备出致密且均匀的PZT铁电薄膜。通过获得高的剩余极化强度,提高PZT膜层的内建电场,从而提高PZT铁电薄膜的光电转化效率。经过500℃高温热处理1 h后不仅提高了PZT的结晶度,同时提高了PZT的致密度,PZT薄膜经过电场的极化,可以获得剩余极化强度为17μc/cm2。紫外光照射下的光电流稳定。

The PZT ferroelectric films were fabricated on the quartz glass by Sol-gel method,the PZT films with high remanent polarization were obtained by adjusting the annealing temperature.The remanent polarization and depolarization electric field were improved result in the improvement of photoelectricity conversion rate.The crystallinity of PZT was increased by high temperature annealing process,and the density of PZT films was also increased.After polarization of PZT under the electric field,the remanent polarization is 17μc/cm2.The photo-current is stable under ultraviolet light.