摘要
对铁芯结构的改进有利于降低微型磁通门传感器的噪声,本文对铁芯结构进行了拓扑分析与优化,并采用标准MEMS工艺制备了相应的多孔铁芯结构微型磁通门,对所制备的微型磁通门进行了主要噪声指标的综合测试与对比分析。实验结果表明,改进后的多孔铁芯结构能很好地降低微型磁通门传感器的噪声,提高器件的综合性能。
Structural improvement of core is conducive to reduce the noise of the micro fluxgate sensor.In this paper,topology analysis and targeted optimization of core was completed.The micro fluxgate based porous core was fabricated by standard MEMS technology.By testing and comparing main noise index,the experimental results show that optimized structure of core can reduce noise of micro fluxgate sensor and enhance overall performance of micro fluxgate.
作者
吕辉
杨慧慧
LYU Hui;YANG Huihui(Electrical Engineering and Automation Institute,Henan Polytechnic University,Jiaozuo 454000,Henan Province,China;Key Laboratory of Control Engineering of Henan Province,Henan Polytechnic University,Jiaozuo 454000,Henan Province,China;Electrical Engineering Institute,Henan College of Industry Information Technology,Jiaozuo 454000,Henan Province,China)
出处
《电子元件与材料》
CAS
CSCD
北大核心
2018年第4期67-71,78,共6页
Electronic Components And Materials
基金
河南省自然科学基金(162300410123)
河南省高等学校控制工程重点学科开放实验室项目(KG2016-11)
河南理工大学博士基金(B2017-22)
关键词
微型磁通门
多孔铁芯
性能测试
噪声
拓扑结构
优化
micro fluxgate
porous core
performance test
noise
topology structure
optimization
