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VO_2薄膜相变温度调节方法及机理

Technological Routes and the Corresponding Mechanisms for Tuning Phase Change Temperature of VO_2 Thin Films
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摘要 VO_2是一种相变温度为68℃(接近室温)的热致相变材料,具有十分广泛的潜在应用价值。但68℃相较于环境温度仍显得较高,而且不同的应用环境对相变温度有不同的需求,因此针对VO_2薄膜相变温度调节问题的研究很有必要。详细介绍了元素掺杂、引入离子液体、氢化处理、界面应力调节等相变温度调节方法并阐述了其各自相变温度调节机理,同时比较了这几种方法的优缺点,并对未来研究方向作出展望,为今后VO2薄膜的制备与应用研究提供了重要参考。 VO2,a type of thermally induced phase change material,whose phase transition temperature is 68℃(closest to room temperature),making it have a very wide potential application value.However,68℃is still a bit higher than the actual am-bient temperature,and there are different requirements for the phase transition temperature in different application environments.Thus it is essential to research the modulation of the phase change temperature of VO2 film.Element doping,introducing ionic li-quids,hydrogenation processing,interface strain dynamics adjustment method and their mechanism are discussed in this paper.It also compares the advantages and disadvantages of each method,predicts the future research direction,paves a way for the further studies on preparation and application of VO2 thin film.
作者 侯典心 路远 杨玚 HOU Dianxin;LU Yuan;YANG Yang(Electronic Engineering Institute of People′s Liberation Army,Hefei 230037;Infrared and Low Temperature Plasma Key Laboratory of Anhui Province,Hefei 230037;State Key Laboratory of Pulsed Power Laser Technology,Hefei 230037)
出处 《材料导报》 EI CAS CSCD 北大核心 2017年第A01期246-250,268,共6页 Materials Reports
基金 脉冲功率激光技术国家重点实验室主任基金(SKL2013ZR03)
关键词 二氧化钒 相变温度调节 元素掺杂 引入离子液体 氢化处理 界面应力 vanadium dioxide phase transition temperature modulation element doping ionic liquid hydrogenation treatment interface strain dynamics
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