低摩擦长寿命类富勒烯碳基薄膜的制备及其摩擦学特性

Synthesis of Low-friction Long-life Fullerene-like Carbon Film and Its Frictional Characteristics

以甲烷(CH4)为前躯体,利用等离子体增强化学气相沉积(PECVD)技术,在单晶硅〈n-100〉基底表面制备含氢类富勒烯碳基薄膜(FL-C∶H)。采用高分辨透射电镜(HRTEM)、拉曼光谱仪(LABRAM)和多功能X射线光电子能谱仪(XPS)对薄膜及磨屑结构进行表征;利用摩擦磨损试验机、扫描电子显微镜(SEM)分别测试薄膜的摩擦学性能和观察磨屑的微观形貌。结果表明,所制备的碳基薄膜具有类富勒烯纳米结构,且磨屑的显微结构亦呈现类富勒烯结构的特征。同时,类富勒烯纳米结构的碳基薄膜具有优异的摩擦学性能,与传统非晶类金刚石薄膜相比,其磨损寿命显著提高,在载荷为30N、摩擦速率为0.1m/s下薄膜的磨损寿命为3 538.2m,摩擦系数低至0.012左右,显示出长寿命低摩擦特性。

Fullerene-like hydrogenated carbon films(FL-C∶H)were grown by pulse plasma enhanced chemical vapor deposition(PECVD)technique on silicon(n-100)substrate using CH 4 as feed stock at ambient temperature.The microstructure of the films and wear debris were characterized by high resolution transmission electron microscopy(HRTEM),Raman spectra(LABRAM)and X-ray photoelectron spectra(XPS).The tribological behaviors were investigated by friction-abrasion testing machine and scanning electron microscope.It was found that the films could be described as fullerene-like nanostructures.The tribological properties of the films were improved significantly.In addition,the FL-C∶H films demonstrate long wear life about 3 538.2 m and ultra-low friction coefficient(0.012)under the 30 N contact load and the 0.1 m/s friction velocity in contrast with the typical hydrogenated carbon films(α-C∶H).