EB-PVD设备逆变电源研制

Design of Inverter Power Supply for EB-PVD Machine

为了提高EB-PVD设备性能、增强其工作灵活性,基于三级AC-DC拓扑电路、多路逆变电路串并联技术、双闭环控制策略分别设计制造了加速电源、灯丝加热电源,并将所研制加速电源、灯丝加热电源与两极电子枪、真空系统、控制系统等进行集成,组成EB-PVD试验装置,分别测试了该装置输出的高压、最大束流、灯丝加热电流、功率变压器输入波形等。试验结果表明:所研制的逆变电源输出高压达到-30k V,束流输出时逆变电源输出特性为恒压特性;灯丝加热电流最大150A,最大束流达到2000m A。这表明所研制的逆变电源满足EB-PVD设备工作需求。

In order to enhance the performance and flexibility of EB-PVD machine,the topology circuit of three parts of AC-DC circuits,the technology of several circuits in series and parallel connection,and double closed loop control have been adopted to design high voltage power supply and filament heating power supply.The inverter power supply,filament heating power supply,EB-PVD gun,vacuum system and others control system were assembled to establish a set of EB-PVD test equipment.Besides the high voltage and the maximal EB current output have been detected,the current of filament heating power supply and the input waves of power transformers also have been measured.Through the series of tests,the results show that not only the maximum high voltage output is up to-30kV,but also the inverter power supply has a good constant voltage character during electron beam output.The maximum electron beam current is up to 2000mA at 150A filament heating current.These test results show that the inverter power supply has fine applicability for EB-PVD machine.