电泳沉积法制备SrTiO_3薄膜电极的工艺研究

Study on Electrophoretic Deposition Preparing SrTiO_3 Thin Film

纳米SrTiO_3具有很广泛的用途,其电泳沉积工艺低成本、易操作,可广泛应用于实验室研究。该文从粉体浓度、碘浓度、沉积电压、沉积时间共4个方面对电泳沉积工艺进行了讨论,得出在电压5 V、SrTiO_3浓度3.5%、碘浓度1.0 mg/m L、600 s条件下沉积的薄膜电极较好,表面均匀,膜厚约为70μm。该实验可作为专业基础实验面向材料、化学专业的本科生、硕士生开放。

Nano-SrTiO3 was widely used in many fields.Electrophoretic deposition processes low-cost,easy to operate,it can be widely used in laboratory research.In this p aper,the optimum process of the electrophoretic deposition process(EDP)in SrTiO3 thin film was studied in powder concentration,iodine concentration,deposition voltage,deposition time.The results show that the thin film electrodes deposited under voltage of 5 V,SrTiO3 concentration of 3.5%,iodine concentration of 1.0 m g/m L and deposition time of 600 s have good surface uniformity and film thickness of about 70 pm.This experiment can be used as a professional basic experim ent for undergraduate,master’s degree students of materials and chemistry.