基于中阶梯光栅光谱仪的激光诱导等离子体分析系统研究

Study on the Laser-Induced Plasma Spectroscopy Based on the Echelle Spectrometer

为了满足激光诱导等离子体分析系统(LIPS)对分光系统的分辨率,光谱范围,体积等多方面要求。本文研制了一台中阶梯光栅光谱仪,该光谱仪能同时获得所有谱段范围内的光谱信息,令LIPS系统可实现快速在线实时分析。并且,该光谱仪采用可调节延迟时间的ICCD作为后端探测器,令整个系统可根据实际实验情况选择最优延迟时间接收光谱,提高了整个系统的信噪比。最后,搭建了一套激光诱导等离子体分析系统,对研制的中阶梯光栅光谱仪在系统中的可用性进行验证。通过对合金样品测试,整个系统的分辨率达0.02nm,光谱范围覆盖190~600nm。并且研制的LIPS系统光谱重复性较好,特征元素波长提取误差不超过0.01nm,可较准确的对样品成分进行分析。

In order to meet the requirements of laser induced plasma analysis system(LIPS),the spectral resolution,spectral range and volume of the optical system.In this paper,the echelle spectrograph is developed.The spectrometer can simultaneously obtain spectral information in all spectral segments,which enables the LIPS system to perform fast,online and real-time analysis.Also,the spectrometer uses an adjustable delay time ICCD as the back end detector.The system can select the optimal delay time to receive the spectrum and improvethe signal-to-noise ratio of the whole system.Finally,a set of laser induced plasma analysis system is built to verify the applicability of the echelle spectrometer in the system.By testing the alloy sample,the resolution of the whole system is 0.02 nm,and the spectrum range is 190~600 nm.Moreover,the LIPS system has good spectral reproducibility,and the extraction error of the characteristic element wavelength is no more than 0.01 nm,which can be used to analyze the composition of the sample accurately.