摘要
在充分理解纳秒脉冲激光作用下近红外激光薄膜的损伤机制的基础上,分别针对反射元件和透射元件的损伤特点,探讨了两种元件的激光损伤规律,提出了有效提升近红外激光薄膜抗激光损伤性能的方法。结果表明:对于反射元件,采用优化后的膜系结构可以大大降低薄膜中由节瘤缺陷引起的电场增强效应,大幅提升损伤阈值2~3倍;对于透射元件,采用合理的刻蚀工艺可有效降低薄膜中的吸收缺陷,有效提升其损伤阈值约1.5倍。
Based on the full understanding of the damage mechanism of near-infrared laser thin film under nanosecond pulse laser,the damage characteristics of the reflective elements and the transmission elements are discussed respectively.The laser damage rules of the two elements are discussed.A method to enhance laser anti-damage performance of near infrared laser thin film is proposed.The results show that the optimized film structure can greatly reduce the electric field enhancement effect caused by the nodule defects in the film and greatly increase the damage threshold by 2 to 3 times.For the transparent components,the reasonable etching process can effectively reduce the absorption defect in the film,and effectively increase the damage threshold by about 1.5 times.
作者
焦宏飞
张学敏
程鑫彬
张锦龙
马彬
王占山
JIAO Hongfei;ZHANG Xuemin;CHENG Xinbin;ZHANG Jinlong;MA Bin;WANG Zhanshan(Key Laboratory of Advanced Micro-Structure Materials,Ministry of Education,Shanghai 200092,China;Institute of Precision Optical Engineering,School of Physics Science and Engineering, Tongji University,Shanghai 200092,China)
出处
《上海航天》
CSCD
2018年第1期1-8,共8页
Aerospace Shanghai
基金
国家自然科学基金(U1630123
61235011
61522506)
国家重大科研装备研制项目(ZDYZ2013-2)
关键词
激光薄膜
激光损伤
损伤阈值
近红外
节瘤缺陷
吸收缺陷
反射元件
透射元件
laser thin film
laser damage
damage threshold
near-infrared
nodule defects
absorbing defects
reflectance optical elements
transmittance optical elements
