双层纳米光栅微位移检测仿真

Simulation of Double Layer Nano-gratings Micro-displacement Detection

针对现有光栅位移传感器分辨率和精度难以提高、体积较大的难题,设计了面内和离面位移检测的双层纳米级光栅结构。用严格耦合波理论分析了单层纳米光栅的衍射特性,通过Gsolver软件对面内和离面的双层纳米光栅结构进行模拟仿真。仿真结果表明:这2种双层纳米光栅结构的0级透射光和反射光的衍射效率随第二层纳米光栅结构的位移移动量周期性变化,通过探测纳米光栅的衍射效率来获得面内或者离面的位移移动量。

Aiming at the problem that the resolution and precision of current grating displacement sensor are difficult to be increased and the volume is large,the nanometer-scale grating structures with in-plane and out-of-plane displacement detection were designed.The single layer nano-grating was analyzed by the rigorous coupled-wave theory,and the double layer nano-gratings structure of the in-plane and out-of-plane was simulated by Gsolver software.The simulation results show that the diffraction efficiency of 0-order transmitted light and reflected light of the double layer nano-gratings structure changes periodically with the displacement of the second layer nano-grating structure,the micro-displacement of the in-plane or out-of-plane can be detected by measuring the diffraction efficiency of the nano-gratings.