硅片线锯废料中硅粉回收的研究

Research On Recycling Of Silicon Powder From Silicon Wire Saw Waste

采用称重法与激光粒度分析仪分析线锯废料的组份,研究不同情况下水力旋流初步富集、不同溶剂相转移再富集的硅粉回收效果,并用ICP-0ES检测回收硅粉的纯度。结果表明,不同批次的废料硅粉含量在4~6%;在进口压力为0.5MPa、循环4次、固含量为3%的条件下初步富集效果最佳;采用烷烃类有机溶剂(煤油)相转移再富集硅粉,在有机溶剂与硅粉质量比为6:1时,可提纯到99.5%的硅粉。对回收硅粉进行元素测定表明,回收硅粉的金属、B、P等杂质均处于可控范围,硅粉能够直接应用于多晶硅铸锭。

The analysis of the wire saw waste by weighing method and LS-900,The effects of initial concentration of hydrocyclone under different conditions and phase transfer recycle of silicon powder with different solvent were investigated,The purity of silicon power was determined by ICP-0ES.The results showed that the content of silicon powder was 4-6%in different batches of wire saw waste,and the initial concentration was the best under the inlet pressure of 0.5MPa,4 cycles and solid content of 3%.The silicon powder can be purified to 99.5%by phase transfer with alkane organic solvent(kerosene)when the mass ratio of organic solvent to silicon dust was 6:1.the Recycle of silicon powder showed that the impurities such as metals、B and P were with in the controlled range by elemental determination,and the silicon powder can be directly applied to the polycrystalline silicon ingot.