多晶硅还原炉能耗分析及节能措施

Energy Consumption Analysis and Energy-saving Measures of Polysilicon Reduction Furnace

基于改良西门子工艺生产多晶硅的物料平衡和能量平衡,从理论上对该工艺中主要耗能设备多晶硅还原炉进行了能耗分析。通过计算得出的还原炉电耗为49.97 kWh/kg,接近实际生产中还原电耗50 kWh/kg,低于GB 29447—2012中准入值和先进值;其中,耗能量最多的是高温冷却水带走的能量,还原尾气带走的热量次之,气体反应热所消耗的能量及炉体散热占比很小。提出回收高温冷却水带出的能量,合理进行能量的套用,降低反应器高径比和还原炉比表面积等节能措施,为解决多晶硅生产中能耗高的问题提供一些思路。

Combined with the material balance and energy balance in the improved Siemens process to produce polysilicon,the energy consumption of polysilicon reduction furnace was analyzed theoretically.The calculation showed that the reduction furnace energy consumption was 49.97 kWh/kg,close to the value in the actual production of 50 kWh/kg,lower than the entry value and advanced value in GB 29447-2012.The most energy was consumed by high temperature cooling water,followed by heat taken away by reduction tail gas,whereas the energy consumed by the reaction heat of gas and the heat dissipation of furnace took up a small proportion.It was proposed to recover the energy from the high temperature cooling water and apply the energy wisely,and reduce the height diameter ratio of the reactor and the specific surface area of the reduction furnace,so as to provide some guidance for solving the problem of high energy consumption during the polysilicon production.