基于分区独立温度控制的探针台卡盘温度均匀性研究

Research on temperature uniformity for chuck of probe station based on partition independent temperature control

在半导体测试的高低温测试中需要有效地保证探针台卡盘表面温度的均匀性。利用基于有限元方法的仿真软件ANSYS Workbench对探针台卡盘冷却层进行建模,研究表面温度场分布情况。同时,对探针台卡盘表面各区域进行温度测试获取探针台卡盘温度分布。仿真结果和实验结果一致,表明探针台卡盘表面中心位置温度最高,距离卡盘中心位置距离越远,温度越低。基于现有探针台卡盘均匀加热下表面温度分布的状况,提出加热板实施分区独立温度控制,从而改善探针台卡盘表面温度的均匀性,提高探针台高低温测试的精确性。

During the high.low temperature test of the semiconductor,the temperature uniformity for the chuck surface of the probe station must be guaranteed.The finite element method based simulation software ANSYS Workbench is used to build the model for the chuck cooling layer of the probe station,so as to conduct research on distribution of surface temperature fields.Temperature test is performed for each area of the chuck surface of the probe station,so as to obtain the temperature distribution for the chuck of the probe station.The simulation result,in consistency with the experimental result,shows that the temperature at the central position of the chuck surface of the probe station is the highest,and the further the position from the central point of the chuck is,the lower the temperature becomes.On the basis of the surface temperature distribution after uniform heating of the current chuck of the probe station,the partition independent temperature control of the heating panel is proposed,so as to improve the temperature uniformity of the chuck surface of the probe station and accuracy of the high.low temperature test of the probe station.