基于微机电系统的高深宽比气相微色谱柱

High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology

色谱柱的微型化是实现气相色谱仪微小型化必须要解决的关键问题之一。该文基于微机电系统技术设计制作了一种具有高深宽比微沟道的气相微色谱柱。通过COMSOL软件进行仿真分析,得出气相微色谱柱具有均匀的流速场分布。测试结果表明,该气相微色谱柱成功分离了烷烃类气体混合物及苯系物,其理论塔板数可达14 028 plates/m,C7~C8的分离度最高,为10.82。这种气相微色谱柱由于具有体积小、能耗低、分离性能好等优点,可望在微小型气相色谱仪上获得应用。

Miniaturization of gas chromatography(GC)columns is one of the key problems associated with microminiaturization of a chromatograph.In this study,a GC column with high-aspect-ratio microchannel based on micro-electro-mechanical system(MEMS)technology has been designed and manufactured.Simulation and analysis by the COMSOL software revealed that the GC column has even velocity field distribution,which is crucial for improving the separation efficiency of the column.The results show that heavy hydrocarbons(C6-C10)and compounds of benzene series can be successfully separated.The number of theoretical plate is 14 028 plates/m,and the resolution of C7-C8 is 10.82.Due to its advantages of smaller volume,lower energy consumption,and better separation performance,the GC column can be applied in micro gas chromatography.