4Yano H, Kouro D, Sasaki Net al. Improvement of poly- mer/fullerene solar ceils by controlling geometry of the ITO substrate surface [ J]. Solar Energy Materials and So- lar Cells ,2009,93 (6) :976-979.
5Leem D S, Lee T, Song T Y. Enhancement of the light out- put of GaN-based light-emitting diodes with surface-pat- terned ITO electrodes by mask less wet-etching [ J ]. So- lid-State Electron ,2007,51 ( 5 ) :793-796.
6Park J Y, Kim H S, Lee D H, et al. A study on the etch characteristics of ITO thin film using inductively coupled plasmas [ J ]. Surface and Coatings Technology, 2000,131 ( 1 ) :247-251.
7Chen M F, Chen Y P, Hsiao W T, et al. Laser direct write patterning technique of indium tin oxide film [J]. Thin Solid Films,2007,515 (24) :8515-8518.
8Chan Chih-Hsiang, Zou Yong-Tong, Liu Ting-Kun, et al. The development of an inspection system for indium tin oxide circuits [ J ]. Measurement Science and Technolo- gy,2012,23 ( 8 ) : 1029-1034.
9Sierros K A, Morris N J, Kukureka S N,et al. Dry and wet sliding wear of ITO-eoated PET components used in flexi- ble optoeleetronie applications[J]. Wear,2009,267( 1 ) : 625-631.
10Yu S K, Liu T K, Lin S K. Height measurement of trans- parent objects by adopting differential interference con- trast technology [J]. Applied Optics, 2010,49 ( 14 ) : 2588-2596.
