适用于光黏工艺的干涉仪公差保证方法

Tolerance assurance of interferometer for optical HCB process

空间干涉测量系统是空间引力波探测的重要组成部分。本文介绍了一种全玻璃材料的差频激光干涉仪的组成结构和工作原理,对差频干涉仪中双相干光束的匹配对准难题,介绍了一种适用于光黏装配工艺的角度公差和位置公差保证方法。这种方法采用了监测系统和微量调整机构相结合的方式,首先,监控系统可以实现光线相对位置的实时测量,给出被调整光线的调整方向和调整量;然后,微量调整机构可以在平面移动和轴向转动3个自由度上,对目标器件实现微米量级的微量调整;监控过程和调整过程反复迭代,可实现对光学元器件的高精度位置控制和角度控制。实验结果表明,在调整方向上角度公差优于80μrad,位置公差优于85μm。本方案基本满足差频激光干涉仪的装配精度需求,为后续更高精度的装配奠定基础。

Space interference measurement system is an important part of gravitational wave detection in space.This paper introduces the composition and working principle of a differential frequency interferometer made of only glass.To address the problem of matching and aligning double coherent beams in differential frequency interferometers,we introduce a method that can guarantee the angular and position tolerance of double frequency laser interferometers;this method is suitable for the hydroxide catalysis bonding assembly process.In the proposed method,an observation system is combined with a microadjustment mechanism.First,the monitoring system measures the relative position of light rays in real time.Next,the microadjustment mechanism adjusts the target device to micron-order resolution along three degrees of freedom,including two-dimensional planar movement and one-dimensional axial rotation.The monitoring and adjustment processes are iterated to achieve high-precision position and angular control of the optical components.Manual adjustments can ensure an angular tolerance and a position tolerance greater than 80μrad and 85μm,respectively.This scheme can meet the accuracy requirements of differential frequency laser interferometers and lay the foundation for achieving higher accuracy in the future.