钛铪酸钡薄膜的制备与形貌

Preparation and Morphology of BaHf_xTi_(1-x)O_3 Thin Films

溶胶-凝胶工艺在(100)Pt/Ti/SiO_2/Si基片上制备了BaHf_xTi_(1-x)O_3(x=0.005,0.01,0.02)薄膜。通过X射线衍射仪、拉曼光谱对薄膜微观结构进行了测试,采用APEX型多功能力学测试系统的3D显微镜模块和SEM对薄膜表面粗糙和厚度进行了表征。结果表明:薄膜中Hf4+进入BaTiO_3晶格中,且BaHf_xTi_(1-x)O_3具有明显的(200)取向,当x=0.005时取向度最大(1.94),晶粒尺寸最小(21.34 nm);薄膜拉曼光谱发现随Hf4+含量的增加BaHf_xTi_(1-x)O_3薄膜各光学声子模对应的拉曼振动模式峰都发生了蓝移,显示出四方相的特征谱,四方相的程度随Hf含量的增大而减弱;所有薄膜表面较平整,均方根粗糙度(RMS)在21~26 nm之间。

The BaHfxTi1-xO3(x=0.005,0.01,0.02)films were prepared by sol-gel process on(100)Pt/Ti/SiO 2/Si substrate with different with different Hf 4+contents.The structures of the films were analyzed by X-ray diffractometer and Raman spectra,at the same time the surface roughness and thickness of samples were characterized by SEM and the 3D microscope module of APEX multifunctional mechanical test system.The results show that Hf 4+compeletely diffuses into the BaTiO 3 lattice and forms ABO 3 perovskite structure,and grain orientation of BaHfxTi1-xO3 have obvious(200)orientation,the maximum degree of orientation is(1.94)at x=0.005,and the grain size is 21.34 nm;Raman spectrum shows that all materials are tetragonal structure.With the increasing of Hf 4+contents,the strength of tetragonal phase decreases.The grain size of all thin films is relatively uniform.The surface of the films is relatively smooth and the root-mean-square roughness(RMS)is between 21 nm to 26 nm.