基于Modbus协议的平整度检测系统研究

Research of Surface Plates Flatness Detection System Based on Modbus Protocol

提出了基于工业通用通信协议Modbus协议的平整度检测系统设计方案。系统依据对角线布点评定法则为基准,采用最小条件原则评定方法,利用SOC系统级MCU芯片为采集器智能核心,通过多路电涡流位移传感器,完成对待测平板的数据采集。检测系统的Modbus通信协议采用RTU传输模式,下位机采用中断方式接收主控机的帧命令信息,并采用查询方式实现。采用Agilent 33220A20 MHz函数发生器、Agilent 34401A数字多用表、PCI-GPIB控制器接口卡,对检测系统进行精度校准。

The method which was based on industrial fieldbus of Modbus protocol for the surface plates flatness measurement and control system was presented in this paper.The system was according to the evaluation rule of diagonal stationing,and used the evaluation method of minimal conditions principle.The systerm used SOC system level MCU as the core,and through multi-channel eddy current displacement sensor to collect the data of the flat.The Modbus communication protocol of detection system adopted RTU transmission mode,and the lower computer adopted the interrupt mode to receive the frame command information of the computer,and used query mode to achieve.Agilent 33220A 20 MHz function generator,Agilent 34401A digital multimeter,and PCI-GPIB controller interface card were used to correct the accuracy of the inspection system.