一种用于太赫兹波扫描成像的X_Y扫描台设计与实现

Design and Implementation of a X＿Y Scanning Stage for Terahertz Imaging

针对太赫兹波扫描成像系统要求,在"步进电机+丝杠螺母"传动机构基础上加入光栅尺作为反馈元件,设计一种位置闭环控制的X_Y扫描台。选用上位机和运动控制卡作为扫描台控制系统核心,采用VC++6. 0语言,利用运动函数库开发扫描控制软件,实现扫描参数配置、扫描轨迹生成、运动控制等功能模块,完成扫描台定点、连续运动。实验结果表明:扫描台稳定可靠,定位误差控制在0. 05 mm以内,满足了太赫兹波扫描成像定位需求。

According to the requirement of terahertz wave scanning imaging system,the position closed-loop controlled X_Y scanning stage was realized on the basis of the stepping motor and screw nut transmission mechanism by adding a grating ruler.PC and motion control card were taken as the core of the control system.The function modules of the scanning control software such as scanning parameter configuration,scanning path generation,motion control,fixed and continuous motion were realized by using VC++6.0 language and function library.The experimental results show that the scanning stage is stable and reliable,and the positioning error is less than 0.05 mm which meets the requirements of THz imaging scanning.