Al-glass-Al阳极键合界面及力学性能的分析

Interfacial investigation and mechanical properties of Al-glass-Al anodic bonding process

利用两步法阳极键合技术成功实现了Al-glass-Al的连接,利用扫描电镜(SEM)观察Al-glass界面形貌,利用辉光放电发射光谱仪(GD-OES)分析界面元素(K,Na,O,Al)分布规律,利用原子力显微镜(AFM)分析键合前后玻璃的表面形貌,采用万能材料试验机测试了不同工艺参数下试样的力学性能.结果表明,第二次键合界面电流值明显高于第一次键合界面电流值;Al-glass-Al界面结合良好,玻璃两侧界面无明显差异;Al3+有向Na+耗尽层中扩散的趋势,先形成的耗尽层中Na+浓度明显高于后形成的耗尽层;键合过程中,Na+在玻璃表面析出,玻璃表面Ra升高,玻璃表面质量下降是造成玻璃试样沿第二次键合面Al(2)-glass界面断裂的主要原因.

The Al-glass-Al joint was successfully bonded by the two-step anodic bonding process.The bonding current in each step of the two-step bonding process was investigated.Scanning electron microscopy(SEM)was performed on the interface for the Al-glass surface.The element profile of the transitional layer was investigated by glow discharge optical emission microscopy(GD-OES).Atomic force microscopy analysis(AFM)was done to investigate the surface roughness on Al-glass.Tensile tests were executed to evaluate the bonding strengths of the specimens.The results indicated that all Al-glass joints displayed a homogeneous microstructure without voids or cracks.There were no differences for the interfacial microstructure between the two sides of the Al.It was also found that Al migrated into the Na+depletion region,the quantification of Na+along the depth direction of Al(1)-glass was larger than the Al(2)-glass.Atomic force microscopy mapping results indicated that sodium precipitated from the back of the glass,which makes the roughness of the surface become coarse.The fracture occurred at the glass-Al(2)interfacial area and the Al was destroyed.