电容式加速度计敏感结构优化设计与仿真

Optimum Design and Simulation of Capacitive Accelerometer Sensitive Structure

介绍一种电容式加速度计的敏感结构,通过Solidworks三维实体模型软件对其建模,推导敏感结构固有频率、灵敏度计算公式,进行理论计算,并对敏感元件簧片尺寸进行优化设计。采用有限元ANSYS仿真软件对敏感结构进行静态和模态分析,对该型加速度计进行动态性能测试。实验结果表明:该型加速度计敏感结构固有频率可达近100 Hz,加速度计频率带宽拓展了130%,仪器抗干扰能力也得到大幅提升,为仪器设备中具有相似敏感结构的振动分析方法和集中参数布置设计提供了参考。

This paper introducd the sensitive structure of a capacitive accelerometer,modeled it by Solidworks 3D solid model software,the natural frequency and sensitivity formula of the sensitive structure were deduced,the size of the sensor element was calculated and the size of the sensor element was optimized.The finite element ANSYS simulation software was used to analyze the sensitive structure static state and modal,and the dynamic performance test of the accelerometer was carried out.The experimental results show that the sensitivity of the accelerometer can reach nearly 100 Hz,the frequency bandwidth of the accelerometer is expanded by 130%,and the anti-jamming ability of the instrument is greatly improved,which provides reference for the vibration analysis method and the centralized parameter layout design with similar sensitive structure in the instrument and equipment.