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氧化锌基乙醇气体传感器研制及特性研究 被引量:10

Fabrication and Sensing Properties of ZnO Based Ethanol Sensors
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摘要 利用水热法合成了不同形貌的ZnO基纳米结构气敏材料,利用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对其进行了结构表征和分析。制备成旁热式气体传感器,测试了其对乙醇(C2H5OH)的气敏特性。实验结果表明:基于ZnO纳米花制作出的传感器比纳米球状传感器对C2H5OH具有更高的灵敏度,在200℃下对50×10-6的C_2H_5OH灵敏度为34.7,是球状ZnO基传感器的1.7倍;两种ZnO基传感器对C2H5OH均表现出较好的重复性,在最佳工作温度下对C_2H_5OH的响应恢复时间均在15秒以内;最后对ZnO基C_2H_5OH气体传感器的气敏机理进行了讨论。 ZnO nanostructures with different morphologies were synthesized by hydrothermal method and characterized by X-ray diffraction(XRD)and scanning electron microscope(SEM).ZnO based gas sensors were fabricated with the synthesized ZnO samples for ethanol(C 2H 5OH)sensing.The experimental results show that the fabricated ZnO nanoflowers sensor has a higher sensitivity than the ZnO nanosphere sensor,and its sensing response to 50×10-6 C 2H 5OH gas is 34.7 at 200℃.Both kinds of ZnO based sensors exhibit good reproducibility to C 2H 5OH at their optimum working temperatures,and the corresponding response and recovery time are within 15 seconds.Finally,the sensing mechanism of ZnO based sensors to C 2H 5OH was discussed.
作者 邹平 洪长翔 奚红娟 黄会贤 李宁 李伟 周渠 ZOU Ping;HONG Changxiang;XI Hongjuan;HUANG Huixian;LI Ning;LI Wei;ZHOU Qu(State Grid Chongqing Changshou Power Supply Company,Chongqing 401220,China;State Grid Chongqing Hechuan District Power Supply Company,Chongqing 401520,China;College of Engineering and Technology,Southwest University,Chongqing 400716,China;State and Chongqing Electric Power Company,Chongqing 400015,China)
出处 《传感技术学报》 CAS CSCD 北大核心 2018年第10期1478-1481,共4页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金项目(51507144) 重庆市自然科学基金项目(cstc2016jcyjA0400)
关键词 气体传感器 氧化锌 水热法 乙醇 气敏特性 gas sensor ZnO hydrothermal method C 2H 5OH sensing properties
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