UV LIGA技术在毫米波太赫兹器件中的应用进展

Progress in application and research of UV LIGA techniques in millimeter wave and terahertz devices

采用紫外光刻电铸和微成型(UV LIGA)技术制造太赫兹真空器件的高频结构,频率为94～220GHz。对于94GHz高频结构,尺寸误差≤15μm,采用此高频结构的脉冲行波管输出功率大于100W;180GHz高频结构,尺寸误差≤5μm,采用此高频结构的太赫兹行波管二倍频器输出功率高于100 mW,带宽为11.4GHz;220GHz高频结构,尺寸误差≤3μm,衰减因子为240 dB/m。UV LIGA技术在太赫兹真空器件中的成功应用,不但为毫米波太赫兹器件研制奠定了基础,同时也为UV LIGA技术在设计制造毫米波太赫兹器件领域,包括有源和无源器件,开辟了一番新天地。

A folded waveguide Slow Wave Structure(SWS)with frequency range from 94 to 220 GHz is fabricated with Ultraviolet Lithographie Galvanoformung Abformung(UV LIGA)technology.For 94 GHz folded waveguide SWS,the accuracy is≤15μm,the output power of 94 GHz pulse Travelling Wave Tube(TWT)with the microfabricated SWS is higher than 100 W.For 180 GHz folded waveguide SWS,the accuracy is≤5μm,the output power is higher than 100 mW with bandwidth of 11.4 GHz.For 220 GHz folded waveguide SWS,the accuracy is≤3μm,and the attenuation factor is 240 dB/m.