原子层沉积法制备氧化锌纳米管

ZnO nanotubes prepared by atomic layer deposition method

采用原子层沉积法成功制备出了大小均匀、形貌规则、晶体质量较好的ZnO纳米管,利用扫描电镜(SEM)、X射线衍射仪(XRD)、X射线光电子能谱(XPS)等对样品表面形貌和物相进行分析,得到的ZnO纳米颗粒为六角纤锌矿结构,纳米管外径2μm,壁厚150nm。还可选用其它孔径的聚碳酸酯薄膜以及不同的原子层沉积循环数,控制管壁的厚度,以得到不同直径的ZnO纳米管。该方法工艺简单,操作简便,无任何中间产物,可实现工业化生产。

By using the atomic layer deposition method,zinc oxide nanotubes with uniform size,regular morphology and good crystal quality were successfully prepared.The surface morphology and phase of the samples were analyzed by scanning electron microscope,X-ray diffraction instrument and X-ray photoelectron spectroscopy.The results show that the obtained ZnO nanoparticles are of hexagonal wurtzite structure.The outer diameter of the nanotubes is 2μm,and the wall thickness is 150 nm.The polycarbonate film with other pore diameter and different atomic layer deposition cycles can be used to control the thickness of the pipe wall to obtain the ZnO nanotubes with different diameters.The method is simple and easy to operate without any intermediate product,so the industrial production can be realized.