摘要
采用传统的常压固相烧结的方法制备了LiNi_(0.5)Co_(0.2)Mn_(0.3)O_2陶瓷靶材。研究了不同烧结温度对于LiNi_(0.5)Co_(0.2)Mn_(0.3)O_2(NCM,523)陶瓷靶断面形貌、物相及晶型结构、相对密度和抗弯强度的影响。通过对NCM陶瓷靶材进行分析表征,研究结果表明,在烧结温度为1 100℃时,靶材具有最优的各项性能,其相对密度为98.8%,抗弯强度为65.7MPa,其各项力学性能均已经到达射频磁控溅射镀膜机所需性能,适合于工业化生产。
LiNi 0.5 Co 0.2 Mn 0.3 O 2 ceramic target was prepared by the conventional atmospheric solid-phase sintering method.The effects of the sintering temperature on the phase and crystal structure,relative density and bending strength of LiNi 0.5 Co 0.2 Mn 0.3 O 2(NCM,523)ceramic target were investigated.The analysis result of the NCM ceramic target indicated that the ceramic target has the best properties when it is sintered at 1 100℃.The relative density is 98.8%,and the bending strength reaches 65.7 MPa.In this case,its mechanical properties can meet the requirement for the target of a RF magnetron sputtering application and its fabrication process can be scaled up.
作者
刘欢
赵江涛
沈金城
董磊
王晨
姚蕾
杨海涛
LIU Huan;ZHAO Jiangtao;SHEN Jincheng;DONG Lei;WANG Chen;YAO Lei;YANG Haitao(Shenzhen Engineering Laboratory of Advanced Technology for Ceramics,Guangdong Engineering Research Center of Functional Material Interface,Key Laboratory of Functional Materials of Shenzhen,College of Materials Science and Engineering,Shenzhen University,Shenzhen 518060,China)
出处
《功能材料》
EI
CAS
CSCD
北大核心
2018年第10期190-193,198,共5页
Journal of Functional Materials
基金
深圳市基础研究资助项目(JCYJ20160422144751573,JCYJ20160422104921235,JCYJ20140418181958489)。
关键词
靶材
射频磁控溅射
三元正极材料
烧结温度
target
RF magnetron sputtering
ternary cathode electrode material
sintering temperature
