在单点金刚石机床上用刨削加工微槽的方法

The Process of Micro Groove Machined by Single Point Diamond Machine Tool

以单点金刚石作为切削刀具的数控机床是一种新型的超精密加工机床,与普通数控机床有许多不同。通过刨削加工微槽的过程介绍该超精密机床的原理和特点。采用刨削加工方式加工微微槽的过程主要分为端面加工和微槽加工两个步骤,具体有:刀具中心调整、主轴调动平衡、数控编程、工件端面加工、侧刀设置、微槽刨削加工等。刀具的尖端与主轴轴线的精准度决定了加工端面中心的微凸点的大小,左右和上下的误差必须在几微米以内。机床主轴转速选择2 000 r/min,该气浮主轴在加工之前必须调节动平衡,要求X向和Y向跳动在100 nm以内。数控程序与普遍数控机床的基本相同,但精度高,NC代码的有效数值一般在小数点后六位。端面加工后表面为镜面,表面粗糙度Ra在100以下,为微槽加工提供了良好的端面。微槽加工时装夹工件的主轴设为C轴模式,完成刨削加工的刀具要侧面安装,刀具沿X轴切削工件表面。实际加工的微槽表面粗糙度Ra为63.573 nm,达到镜面效果。该加工微槽的过程和参数设置可为类似的加工工艺应用提供参考。

The CNC machine tool with single point diamond as cutting tool is a new kind of ultra-precision machine tool,which is different from ordinary CNC machine tool.In this paper,the principle and characteristics of the ultra-precision machine are discussed through the process of ruling micro groove.Micro ruling process consists of two steps:end face cutting and micro groove ruling,which including:tool center adjustment,spindle balancing,CNC programming and machining,V groove ruling,etc.The precision of the tip of the tool and spindle axis determines the point size of the center on the end face,and the error must be within a few microns.The spindle speed is selected at 2 000 r/min.The gas bearing spindle must adjust the dynamic balance before processing,and the X and Y direction vibration amplitude are required below 100 nanometers.The NC program is the same as the universal CNC machine,but the accuracy is high,and the effective value of NC code is generally six decimal places.The end surface is like mirror,and the surface roughness Ra is below 100,which provides a good end face for micro groove ruling.When micro groove ruling the workpiece is fixed on the spindle that is set at C axis mode,and the tool is ruling the workpiece end surface along the X-axis.Ra the surface roughness of the microgroove is 63.573 nanometer,it achieves the mirror effect.The setup and machining process can provide reference for similar processing.