柔性砷化镓薄膜太阳电池剥离(lift-off)技术研究

Study on Lift-off Technology of Flexible GaAs Thin Film Solar Cells

对柔性砷化镓薄膜太阳电池关键技术进行研究,通过对柔性衬底表面处理、外延片/柔性衬底键合、衬底剥离技术和柔性薄膜外延层器件工艺技术等进行研究,成功地将砷化镓电池外延层转移到柔性聚酰亚胺薄膜衬底上,研制出效率为30. 5%(AM0,25℃)的柔性砷化镓薄膜太阳电池,其重量比功率达到2153 W/kg,为将来卫星及临近空间飞行器的应用打下技术基础。

Key technologies of flexible GaAs thin film solar cells were studied,including the surface preparation of flexible substrates,the bonding of extended/flexible substrates,the technology of substrates stripping,and the technology of flexible thin film extended-layer devices.GaAs solar cells epitaxial layer onto the flexible PI substrate were successfully transferred.The flexible GaAs thin film solar cell with 30.5%efficiency(AM0,25℃)was developed.Its weight ratio power is up to 2153 W/kg.It will lay the technical foundation for the future application of satellites and adjacent space vehicles.